Research Article

A New Theoretical Method for Solving Forward Kinematics of the Parallel Mechanisms Based on Transfer Matrix

Table 1

Specific parameters of SLC-1720 actuator.

ParameterValue

Dimensions()
Max. lift force (N)>1.5
Trval (mm)±6
Scan resolution (nm)<1
Step width (nm)1-150
Max. frequency (kHz)18.5