Research Article
A New Theoretical Method for Solving Forward Kinematics of the Parallel Mechanisms Based on Transfer Matrix
Table 1
Specific parameters of SLC-1720 actuator.
| Parameter | Value |
| Dimensions() | | Max. lift force (N) | >1.5 | Trval (mm) | ±6 | Scan resolution (nm) | <1 | Step width (nm) | 1-150 | Max. frequency (kHz) | 18.5 |
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