High-Temperature Measurement Technology for Microwave Surface Resistance of Metal Materials

Table 6

Resonant frequency, quality factor in calibration state, and calculated equivalent MSR of the main chamber.

Mode	TE011	TE012	TE013	TE014	TE015	TE016	TE017	TE018
(GHz)	7.31	8.09	9.25	10.66	12.24	13.39	15.69	17.59
	13449	15285	16821	19651	21521	22845	24741	25133
(mΩ)	56.6	59.5	67.8	72.1	81.0	95.3	82.7	115.2