Research Article
Design of Hybrid Bandpass Filter Chips with High Selectivity and Wideband Using IPD and FBAR Technology
Figure 11
(a) The enlarged schematic diagram of circuit section with physical dimensions (units: μm) (, , , , , , , , , , , , , , , l4 = 90, , , , , , and ). (b) The acoustic-electric hybrid simulation results of chip A.
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