Design of Hybrid Bandpass Filter Chips with High Selectivity and Wideband Using IPD and FBAR Technology

Table 1

Stacks and resonant frequencies of and .

	Thickness (nm)					Resonant frequencies^1 (GHz)
	PS	TE	PZ	BE	SEED
	160	75	290	140	30	: 5.343, : 5.530
	160	75	290	140	30	: 5.343, : 5.530

¹ and () are series resonant frequencies and parallel resonant frequencies of and .