Multiposition Rotation Interference Absolute Measurement Method for High-Precision Optical Component Surfaces

Figure 3

Distributions of root-mean-square (RMS) differences between the generated surface and the reconstructed surface obtained for flat A with different numbers of measurement rotations N: (a) N = 3, (b) N = 6, (c) N = 9, and (d) N = 12.

(a)

(b)

(c)

(d)