Multiposition Rotation Interference Absolute Measurement Method for High-Precision Optical Component Surfaces

<div>Peak-to-valley (PV) and root-mean-square (RMS) differences between reconstructed surfaces obtained with <i>N</i> = 9 and generated surfaces <i>A</i>, <i>B</i>, and <i>C</i> with respect to the average deviation of the generated surfaces from a perfect plane. The deviations of all three surfaces from a perfect plane are nearly equivalent in all cases.</div>

International Journal of Optics

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Figure 5

Figure 5: Multiposition Rotation Interference Absolute Measurement Method for High-Precision Optical Component Surfaces 