Research Article
Multiposition Rotation Interference Absolute Measurement Method for High-Precision Optical Component Surfaces
Figure 6
Schematic illustrating various clamping states: (a) standard clamping with flat Cs on the top and flat B in contact with a planar surface, (b) standard clamping with flat A on the top and flat C in contact with a planar surface, and (c) proposed deformation compensation method with flat A clamped on the top and flat Cs similarly clamped below.
| (a) |
| (b) |
| (c) |