Research Article
Multiposition Rotation Interference Absolute Measurement Method for High-Precision Optical Component Surfaces
Figure 7
Distributions of peak-to-valley (PV) deviations from a perfect plane obtained experimentally for the reconstructed reference mirror surfaces using the proposed computational method to compensate for the gravity-induced deformations of the three reference mirrors in the multiposition rotation absolute measurements conducted with Nā=ā10: (a) upper surface of reference mirror A, (b) upper surface of reference mirror B, and (c) upper surface of reference mirror C.
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