Multiposition Rotation Interference Absolute Measurement Method for High-Precision Optical Component Surfaces

Figure 8

Distributions of peak-to-valley (PV) deviations from a perfect plane obtained experimentally for the reconstructed reference mirror surfaces using the proposed mechanical clamping method to compensate for the gravity-induced deformations of the three reference mirrors in the multiposition rotation absolute measurements conducted with N = 10: (a) upper surface of reference mirror A, (b) upper surface of reference mirror B, and (c) upper surface of reference mirror C.

(a)

(b)

(c)