High-Accuracy Surface Profile Measurement Based on the Vortex Phase-Shifting Interferometry

Figure 5

Experimental setup for measuring the surface profile based on optical vortex phase shift. P1, polarizer; P2, analyzer; BS, beam splitter; LC-SLM, liquid crystal spatial light modulator; M, mirror; L1 and L2, collimator; CCD, charge coupled device camera; PC1 and PC2, computers.