Research Article
Design and Analysis of Target Simulator Using All Spherical System with High Matching Rate
| Surfaces | ∆x (mm) | ∆y (mm) | ∆z (mm) | ∆θx | ∆θy | RMS/λ |
| Fold mirror | — | — | 0.1 | 30″ | 30″ | 1/20 | Field lens | — | — | — | — | — | 1/30 | PM | 0.05 | 0.05 | 0.05 | 40″ | 40″ | 1/30 | SM | 0.08 | 0.08 | 0.08 | 35″ | 35″ | 1/30 | TM | 0.05 | 0.05 | 0.05 | 40″ | 40″ | 1/30 |
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