Design and Analysis of Target Simulator Using All Spherical System with High Matching Rate

Table 3

Tolerance settings.

Surfaces	∆x (mm)	∆y (mm)	∆z (mm)	∆θx	∆θy	RMS/λ
Fold mirror	—	—	0.1	30″	30″	1/20
Field lens	—	—	—	—	—	1/30
PM	0.05	0.05	0.05	40″	40″	1/30
SM	0.08	0.08	0.08	35″	35″	1/30
TM	0.05	0.05	0.05	40″	40″	1/30