Influence of Substrate on Crystal Orientation of Large-Grained Si Thin Films Formed by Metal-Induced Crystallization

Figure 1

Schematic cross-sections and optical micrographs for a sample with an AZO underlayer, annealed at 500°C for (a) 80 min, (b) 100 min, and (c) 130 min. Each diagram corresponds to its respective optical micrograph showing the back surface of the sample through the transparent AZO and glass.

(a)

(b)

(c)