Comparison of the Electrical Properties of PERC Approach Applied to Monocrystalline and Multicrystalline Silicon Solar Cells

Table 1

Process sequence of Al-BSF solar cells.

Step number	Process description
1	Acid or alkaline texturing
2	POCl3 diffusion
3	PSG removing & edge isolation
4	SiN:H ARC on front side
5	Screen-printing and metallization