Comparison of the Electrical Properties of PERC Approach Applied to Monocrystalline and Multicrystalline Silicon Solar Cells

Table 2

Process sequence of PERC solar cells.

Step number	Process description
1	Acid or alkaline texturing
2	POCl3 diffusion
3	PSG removing & edge isolation
4	SiN:H ARC on front side
5	Rear surface polishing
6	Rear passivation layer
7	Rear laser opening
8	Screen-printing and metallization