Modeling and Simulation of a Chemical Vapor Deposition

Table 10

Parameters of source concentration.

Point source at position	(𝑥,𝑦)=(50,20)
Starting point of source concentration	𝑡start=0.0
End point of source concentration	𝑡end=110^8
Amount of permanent source concentration	𝑐source=1.0
Number of time steps	25