Modeling and Simulation of a Chemical Vapor Deposition

Table 5

Model parameters.

Density	𝜌=1.0
Mobile porosity	𝜙=0.333
Immobile porosity	0.333
Diffusion	𝐷=0.0
Longitudinal dispersion	𝛼𝐿=0.0
Transversal dispersion	𝛼𝑇=0.00
Retardation factor	𝑅=100𝑒−4 (Henry rate)
Velocity field	𝐯=(0.0,−4.0⋅10^−8)^𝑡
Decay rate of species of 1st EX	𝜆𝐴𝐵=1⋅10^−68
Decay rate of species of 2nd EX	𝜆𝐴𝐵=2⋅10^−8, 𝜆𝐵𝑁𝑁=1⋅<10^−68
Decay rate of species of 3rd EX	𝜆𝐴𝐵=0.25⋅10^−8, 𝜆𝐶𝐵=0.5⋅10^−8
Geometry (2D domain)	Ω=[0,100]×[0,100]
Boundary	Neumann boundary at top, left, and right boundaries
	Outflow boundary at bottom boundary