Assessing the Oxidative Degradation of N-Methylpyrrolidone (NMP) in Microelectronic Fabrication Processes by Using a Multiplatform Analytical Approach

<div>Semiconductor device fabrication process used to create integrated circuits that are present in electrical and electronic devices. Adapted from Dean et al. [<a href="/journals/jamc/2020/8265054/#B2">2</a>].</div>

Journal of Analytical Methods in Chemistry

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Figure 1: Assessing the Oxidative Degradation of N-Methylpyrrolidone (NMP) in Microelectronic Fabrication Processes by Using a Multiplatform Analytical Approach 

Figure 1 | Assessing the Oxidative Degradation of N-Methylpyrrolidone (NMP) in Microelectronic Fabrication Processes by Using a Multiplatform Analytical Approach 