Self-Organization-Based Fabrication of Stable Noble-Metal Nanostructures on Large-Area Dielectric Substrates

Figure 5

SEM images of nanstructures produced by RIE: (a) Au mask, (b) and (c) the samples after etching the substrate during 20 and 25 min, respecticely, and (d) a sample of Figure 4(d) with extra nanoholes appeared in the mask. The view angles are shown.