Research Article

CPLD-Based Displacement Measurement System for Nanoscale Grating Ruler

Table 1

CPLD chip working parameters.

ModelBasic materialsSignal periodFrequency

Test deploymentCeramics0.25−1000
VoltageAluminum alloy0.33−850
Electric currentCopper alloy0.47−1200
PowerGlass0.59−1130
LengthSteel belt0.84−1480