Air Gauge Characteristics Linearity Improvement

Table 1

Results of the calibration.

Parameter	= 40 μm	= 50 μm	= 60 μm	= 70 μm	= 80 μm	= 90 μm	= 100 μm
[μm]	91.6	113.5	139.5	165.5	191.5	221.5	249.5
Measuring range [μm]	52.1	63.9	79.9	96.0	111.9	134.0	149.8
	0.9978	0.9991	0.9984	0.9969	0.9953	0.9922	0.9902
	0.9989	0.9995	0.9992	0.9984	0.9976	0.9961	0.9951
[%]	2.9	2.0	3.6	4.2	5.4	6.5	4.8