Strength and Fracture Resistance of Amorphous Diamond-Like Carbon Films for MEMS

Table 1

Tensile strength of ta-C as a function of specimen dimensions.

Thickness (𝜇m)	Length (𝜇m)	Tensile Strength (GPa)
0.5	500	5.4±1.2
	1000	5.7±0.3
1.0	500	5.5±0.9
	1000	3.9±0.7
2.2	500	4.3±1.4
	1000	3.4±0.9
3.0	500	2.2±0.5
	1000	2.3±0.5