Structural and Mechanical Properties of CrN<sub>x</sub> Coatings Deposited by Medium-Frequency Magnetron Sputtering with and without Ion Source Assistance

<table>Variation in rms roughness measured from AFM images of the CrN<sub>x</sub> coatings as a function of <svg height="16.450001" id="M38" style="vertical-align:-3.39069pt" version="1.1" viewbox="0 0 18.85 16.450001" width="18.85" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
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Journal of Nanomaterials

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Figure 5

Figure 5: Structural and Mechanical Properties of CrN<sub>x</sub> Coatings Deposited by Medium-Frequency Magnetron Sputtering with and without Ion Source Assistance 

Figure 5 | Structural and Mechanical Properties of CrNx Coatings Deposited by Medium-Frequency Magnetron Sputtering with and without Ion Source Assistance 