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Journal of Nanomaterials
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Journal of Nanomaterials
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2013
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Article
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Fig 2
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Research Article
Hard and Soft Multilayered SiCN Nanocoatings with High Hardness and Toughness
Figure 2
AFM topography image of multilayer layer SiCN film on Si: (a) film C (layer AB) and (b) triple layer SiCN film E (ABA).
(a)
(b)