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Journal of Nanomaterials
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Journal of Nanomaterials
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2013
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Article
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Fig 4
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Research Article
Hard and Soft Multilayered SiCN Nanocoatings with High Hardness and Toughness
Figure 4
Cross-sectional TEM microstructure of SiCN layered film: (a) AB layer interface and SAED from Layer B and (b) B middle soft A top hard layer interface.
(a)
(b)