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Journal of Nanomaterials
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Journal of Nanomaterials
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2013
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Article
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Fig 6
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Research Article
Hard and Soft Multilayered SiCN Nanocoatings with High Hardness and Toughness
Figure 6
Indentation picture of SiCN film on SS 304 (a) film E; HSH layer at 2000 gf, (b) Film A at 1000 gf and (c) Film D; SH layer at 1000 gf.
(a)
(b)
(c)