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Journal of Nanomaterials
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Journal of Nanomaterials
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2013
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Article
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Fig 7
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Research Article
Hard and Soft Multilayered SiCN Nanocoatings with High Hardness and Toughness
Figure 7
A typical cracked surface of SiCN coated multilayer E (ABA) silicon (Si 100) sample at 1000 gf load.