Research Article
Hard and Soft Multilayered SiCN Nanocoatings with High Hardness and Toughness
Table 1
Deposition parameters for the single-layer and multilayer Si–C–N films deposited by DC magnetron sputtering.
| Type of coating | Nature of coating | Nitrogen pressure (mbar) | Argon pressure (mbar) | Deposition pressure (mbar) |
| Single-layer SiCN coating (A) | Hard | 0.001 | 0.009 | 0.01-0.02 | Single-layer SiCN coating (B) | Soft | 0.099 | 0.001 | 0.09-0.1 | Double-layer SiCN coating (C) (AB) | Hard | 0.001 | 0.009 | 0.01 | Soft | 0.099 | 0.001 | 0.09-0.1 | Double-layer SiCN coating (D) (BA) | Soft | 0.099 | 0.001 | 0.09-0.1 | Hard | 0.001 | 0.009 | 0.01-0.02 | Trilayer SiCN (E) (ABA) | Hard | 0.001 | 0.009 | 0.01 | Soft | 0.099 | 0.001 | 0.09-0.1 | Hard | 0.001 | 0.009 | 0.01 |
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