Research Article
Hard and Soft Multilayered SiCN Nanocoatings with High Hardness and Toughness
Table 2
Hardness, modulus of elasticity, percentage elastic recovery of single-layer, and multilayer by nanoindentation.
| Film | No. of layers (substrate-SS304) | Hardness (GPa) | Modulus of elasticity (GPa) | Percentage elastic recovery (%) |
| A | 1 | 31.7 | 266.57 | 59.8 | B | 1 | 9.629 | 115.745 | 55.0 | C (AB) | 2 | 25.978 | 266.138 | 52.6 | D (BA) | 2 | 36.43 | 339.387 | 52.3 | E (ABA) | 3 | 36.394 | 317.236 | 61.9 |
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