Research Article

Responsivity Dependent Anodization Current Density of Nanoporous Silicon Based MSM Photodetector

Table 1

Etching current density dependent Schottky barrier height, ideality factor, and saturation current of Pt/NPSi system.

Anodization current density (mA/cm2) (eV)Saturation current (A)

200.674.61.2 × 10−7
250.685.11.9 × 10−7
350.694.12.5 × 10−7