Dynamic Interferometry Lithography on a TiO₂ Photoresist Sol-Gel for Diffracting Deflector Module

Figure 8

Efficiency (in arbitrary units) of the −1st order for 600 nm period diffraction grating in normal incidence as a function of the wavelength. Curve (a) is for TE polarization, curve (b) is for TM polarization, and curve (c) is for TE + TM.