Effects of Strategically Placed Water Droplets on Monolayer Growth of Molybdenum Disulfide

Figure 1

(a) Schematic illustration of the CVD system; (b) temperature profile of the growth chamber with respect to MoO₃ and S precursors. The various stages of the growth process are labeled on the plot and the significance of the various stages are explained on the right side of the plot. (c) Optical image showing placement of water droplet on a Si substrate prior to its loading in the growth chamber, schematic of water droplet on substrate is shown below. (d) SEM and (e) optical images of monolayers of MoS₂ growth near the edge of the water droplet position. It shows a transition region from continuous film to island growth separated by contour of the droplet (shown by dashed line). Scale bars, 10 μm.