Morphology Evolution of Mn-Si Composition Gradient Micro/Nanomaterials Prepared by Oxygen Assisted Chemical Vapor Deposition

Figure 3

(a)–(c) Mn and Si element mapping of composition graded polyhedron materials prepared by direct reaction of Mn particles with silicon wafer; (d) change of Mn and Si concentration via location points from top to down; (e) typical polyhedron structures; (f)–(h) measured spectrum of elements Mn and Si at points 1, 3, and 5.

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