High-Temperature Conductive Stability of ITO/Pt Bilayer-Film Electrode for Applications in High-Temperature SAW Devices

Figure 8

(a) Measured relationship between the effective conductivity and the area fraction of Pt for the ITO/Pt and film electrodes, (b) the fabricated SAW device, and (c) its performance after annealing at 1000°C for different times.

(a)

(b)

(c)