Adiabatic CMOS-Based Electrostatic MEMS Actuation for Reduced Dynamic Power and Switching Activity

Table 1

Array control scheme for switched capacitor.

Active control signals	Active switches	Output
CTRL
CTRL1–CTRL2
CTRL1–CTRL3
CTRL1–CTRL4
CTRL1–CTRL5
CTRL1–CTRL6
CTRL1–CTRL7
CTRL1–CTRL8