Adiabatic CMOS-Based Electrostatic MEMS Actuation for Reduced Dynamic Power and Switching Activity

Table 2

Area utilization without energy recycling.

Logic utilization	Used	Available	Utilization
No/- of slice flip flops	26	7168	1%
No/- of 4 input LUTs	131	7168	1%
No/- of occupied slices	96	3584	2%
Number of slices containing only related logic	96	96	100%
Number of slices containing only unrelated logic	0	96	0%
Total number of 4 input LUTs	157	7168	2%
Number of bonded IOBs	78	141	55%
Average fan-out	3.31