Adiabatic CMOS-Based Electrostatic MEMS Actuation for Reduced Dynamic Power and Switching Activity

Table 3

Area utilization summary employing adiabatic controller.

Logic utilization	Used	Available	Utilization
No/- of slice flip flops	67	7168	1%
No/- of 4 input LUTs	175	7168	2%
No/- of occupied slices	124	3584	3%
Number of slices containing only related logic	124	124	100%
Number of slices containing only unrelated logic	0	124	0%
Total number of 4 input LUTs	209	7168	2%
Number of bonded IOBs	80	141	56%
Average fan-out	2.95