Research Article
Adiabatic CMOS-Based Electrostatic MEMS Actuation for Reduced Dynamic Power and Switching Activity
Table. 4
Comparison of parameters.
| | Parameters | Charge pump-based MEMS electrostatic actuator [8] | Adiabatic controller-based MEMS electrostatic actuator |
| | CMOS technology | 0.13 μm | 0.13 μm | | Clock frequency | 50 MHz and 80 MHz | 40 MHz | | Area (mm2) | 0.0645 | 0.0645 | | Load impedance | 1 pF | 1 pF | | Rise time (ns) | 7 μs | 80 ns | | Fall time (ns) | 6.11 μs | 6.40 μs | | Nonclock sets of fan-out | 3.31 | 3.11 | | Leakage power consumption (W) | 0.00006 | 0.00006 | | Power consumption (W) | 0.00154 | 0.00099 | | Supply voltage | 1.2 | 1.2 | | Number of stages | 8 | 8 | | Number of bonded IOBs | 55% | 51% | | Total number of 4 LUTs | 2% | 2% |
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