Research Article
Effect of Nanoindentation Temperature on Plastic Deformation of 3C-SiC Based on the Molecular Dynamics Method
Table 1
Set the parameters of the model.
| | Related parameters | Parameter value |
| | 3C-SiC specimen size | | | Number of atoms of diamond spherical indenter | 1021520 | | Number of atoms in 3C-SiC sample | 115845 | | Indentation crystal plane | (010) | | Indentation temperature | 10 K, 300 K, 600 K, 900 K | | Indentation speed | 50 m/s | | Indentation depth | 1.0 nm | | Step size | 1 fs |
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