Research Article

Improvement of the Parameter Distribution of TiN/HfO2/CeOx/TiN Memristors by Rapid Thermal Annealing

Table 1

Mean values, standard deviation, and CV (in the brackets) of the , , , and of TiN/HfO2//TiN devices before and after annealing at 400°C for 2 min.

(V) [CV] (V) [CV] (Ω) [CV] (Ω) [CV]

TiN/HfO2//TiN (unannealed) [15.68%] [4.56%] [36.95%] [47.56%]
TiN/HfO2//TiN
(400°C-2 min)
[10.18%] [1.85%] [10.99%] [22.48%]

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