Analysis of Physical, Ocular, and Aquaphobic Properties of Zirconium Oxide Nanofilms by Varying Sputtering Pressure

Table 1

ZrO₂ film parameters at various pressures.

Pressure (mTorr)	O (atomic weight %)	Zr (atomic weight %)	Average transmittance %	Extinction coefficient	Bandgap (eV)
5	72.62	27.38	98	0.22	5.33
10	72.89	27.11	96	0.28	5.35
15	72.02	27.98	94	0.31	5.43
20	72.08	27.92	95	0.26	5.41
25	73.21	26.79	97	0.23	5.39