Analysis of Physical, Ocular, and Aquaphobic Properties of Zirconium Oxide Nanofilms by Varying Sputtering Pressure

Table 2

Width of ZrO₂ films by SEM cross-section.

Pressure (mTorr)	Width of ZrO2 films (nm)
	SEM image	Surface profilometer	Transmission data
5	715	713	714
10	728	726	727
15	735	730	734
20	724	722	723
25	713	711	712