Research Article
Fabrication of UV Photodetectors Based on Photoelectrochemically Etched Nanoporous Silicon: Effect of Etchants Ratio
Table 3
Parameters of the n-PSi-based photodetectors for different chemical ratios (HF:C2H6O:H2O2) and illuminated under a wavelength of 365 nm.
| | Anodization chemical ratio (HF:C2H6O:H2O2) | VBias (V) | Id (A) | Iph (A) | S (%) | G | R (A/W) | ΦB (eV) | tRcs (s) | tRec (s) |
| | (1 : 1 : 0) | 3 | 4.43 × 10−4 | 21 × 10−4 | 347.04 | 4.47 | 3.27 | 0.66 | 1.68 | 0.89 | | 5 | 1.47 × 10−4 | 10 × 10−4 | 566.66 | 6.80 | 0.65 | 0.76 | | 7 | 1.90 × 10−4 | 11 × 10−4 | 748.94 | 5.78 | 0.77 | 0.81 |
| | (1 : 3 : 0) | 3 | 9.64 × 10−5 | 81.4 × 10−5 | 744.39 | 8.44 | 4.10 | 0.88 | 0.65 | 0.70 | | 5 | 1.22 × 10−5 | 36 × 10−5 | 2,850.81 | 29.50 | 0.59 | 0.58 | | 7 | 1.47 × 10−5 | 10 × 10−4 | 566.66 | 6.80 | 0.57 | 1.40 |
| | (2 : 1 : 1) | 3 | 2.21 × 10−5 | 62.8 × 10−5 | 2,741.62 | 28.41 | 9.17 | 0.96 | 0.55 | 0.53 | | 5 | 1.81 × 10−5 | 109 × 10−6 | 5,922.09 | 60.22 | 0.56 | 0.25 | | 7 | 6.12 × 10−5 | 9.91 × 10−5 | 61.921 | 1.61 | 0.50 | 0.45 |
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