SU-8 as Hydrophobic and Dielectric Thin Film in Electrowetting-on-Dielectric Based Microfluidics Device

Table 2

Working voltage for combination of different dielectric in EWOD.

S. no.	Dielectric 1	Dielectric 2	Voltage	Reference
1	Parlyene	Teflon	30–100 V	[2]
2	PECVD Oxide	Teflon	100 V	[12]
3	SiO2	Cytop	85 Vac	[13]
4	Parlyene	Teflon	80 V	[14]
5	Parlyene	Teflon	110 Vrms	[15]
6	SiO2	Teflon	25–100 V	[16]
7	SiO2	Teflon	45 V	[17]
8	Parlyene	Teflon	80–150 Vrms	[18]
9	SiO2	Teflon	50–200 V	[19]
10	SU-8	—	70	Present design