Deposition and Characterization of Molybdenum Thin Film Using Direct Current Magnetron and Atomic Force Microscopy

Table 4

Grain analysis of Mo thin film according to deposition time.

⁢	Average
Unit	μm^2	μm
Deposition time (min)	Area	Size	Perimeter	Length
5	0.0035	0.046	0.19	0.068
20	0.017	0.12	0.48	0.175
35	0.0011	0.03	0.12	0.04
65	0.0023	0.04	0.175	0.058
85	0.003	0.045	0.2	0.065