Obtaining Silicon Oxide Nanoparticles Doped with Fluorine and Gold Particles by the Pulsed Plasma-Chemical Method

Figure 1

Scheme of experiment: diode chamber of the TEA-500 accelerator (1); cathode holder (2); cathode (graphite, 45 mm diameter) (3); anode grid (3 mm thick) (4); plasma-chemical reactor (PCR) (5); product collection system (6); high-pressure vacuum pump (7); PCR heating unit (8); oxygen cylinder (9); hydrogen cylinder (10); SiCl₄ dispenser (11).