Ta<sub>2</sub>O<sub>5</sub> Thin Films for Capacitive RF MEMS Switches

<table>(a) Sketch of the Ta<sub>2</sub>O<sub>5</sub>-based MIM capacitors. (b) Plan view SEM image of the Ta<sub>2</sub>O<sub>5</sub> surface. (c) Cross-sectional image of a Ta<sub>2</sub>O<sub>5</sub>-based MIM structure.</table>

Journal of Sensors

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Figure 1

Figure 1: Ta<sub>2</sub>O<sub>5</sub> Thin Films for Capacitive RF MEMS Switches 

Journal of Sensors

Ta2O5 Thin Films for Capacitive RF MEMS Switches

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Ta₂O₅ Thin Films for Capacitive RF MEMS Switches