Research on Nonlinear Dynamics of Drive Mode in <i>Z</i>-Axis Silicon Microgyroscope

<table>Dependence of amplitude-frequency characteristic on DC bias <svg height="12.1839pt" id="M101" style="vertical-align:-3.37758pt" version="1.1" viewbox="0 -8.80632 12.99 12.1839" width="12.99pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.0135,0,0,-0.0135,0,0)"><path d="M697 650H468L461 623L492 619C539 613 547 605 518 546C481 471 367 264 278 116H276C239 278 197 500 186 567C180 604 185 613 226 619L252 623L260 650H24L17 623C78 617 92 613 108 533L216 -11H247C365 200 515 462 560 529C616 612 624 615 689 623L697 650Z" id="g113-87"></path><glyph.data ascent="3473" descent="-2876" horiz-adv-x="709" vert-adv-y="709"></glyph.data></g><g transform="matrix(.0095,0,0,-0.0095,7.641,3.264)"><path d="M538 684C542 703 539 710 529 710C512 710 455 682 363 674L361 644H396C444 644 448 642 438 594L405 438C373 450 347 451 336 451C288 451 200 416 147 374C69 312 24 207 24 113C24 29 60 -12 94 -12C126 -12 156 4 196 30C231 53 296 100 346 166H348L328 81C311 10 325 -12 348 -12C380 -12 450 24 512 98L495 125C466 97 431 70 417 70C408 70 408 80 411 98L538 684ZM390 373L361 240C336 196 210 56 145 56C132 56 113 73 113 131C113 216 156 338 220 379C243 394 266 402 303 402C331 402 375 388 390 373Z" id="g50-101"></path><glyph.data ascent="3443" descent="-2856" horiz-adv-x="564" vert-adv-y="564"></glyph.data></g></svg>. (a) Frequency sweeps up. (b) Frequency sweeps down.</table>

Journal of Sensors

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Figure 11

Figure 11: Research on Nonlinear Dynamics of Drive Mode in <i>Z</i>-Axis Silicon Microgyroscope 

Journal of Sensors

Research on Nonlinear Dynamics of Drive Mode in Z-Axis Silicon Microgyroscope

Figure 11