Frequency Tuning of Work Modes in <i>Z</i>-Axis Dual-Mass Silicon Microgyroscope

<table class="figure-group"><tr class="fig-image" id="a"><td><object data="https://static-preview.hindawi.com/articles/js/volume-2014/891735/figures/891735.fig.001a.svgz" name="891735.fig.001a" type="image/svg+xml"></object></td></tr><tr class="fig-caption"><td><b>(a) </b>Schematic structure of the gyroscope</td></tr><tr class="fig-image" id="b"><td><object data="https://static-preview.hindawi.com/articles/js/volume-2014/891735/figures/891735.fig.001b.svgz" name="891735.fig.001b" type="image/svg+xml"></object></td></tr><tr class="fig-caption"><td><b>(b) </b>Simplified kinematics model for the dual-mass vibration in the gyroscope</td></tr></table>

<div>Structure of the dual-mass silicon microgyroscope.</div>

Journal of Sensors

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Figure 1

Figure 1: Frequency Tuning of Work Modes in <i>Z</i>-Axis Dual-Mass Silicon Microgyroscope 

Journal of Sensors

Frequency Tuning of Work Modes in Z-Axis Dual-Mass Silicon Microgyroscope

Figure 1