Frequency Tuning of Work Modes in Z-Axis Dual-Mass Silicon Microgyroscope

Table 2

Designed structure parameters for gyroscope.

Parameter		Value	Unit
stiffness		302.2	N/m
coupling stiffness		74.6	N/m
stiffness		431.7	N/m
coupling stiffness		20.9	N/m
mass		0.68	mg
mass		0.68	mg
Tuning comb		19	—
		60	m
		300	m
		4.5	m