A New MEMS Stochastic Model Order Reduction Method: Research and Application

Table 1

The parameters of single-ended fixed electrostatic actuating microbeam structure.

(beam length)	610
(beam width)	40
(beam thickness)	2.2
(initial gap distance)	2.3
(material Young’s modulus)	149 GPa
(material density)	2330 kg/m^3
(air viscosity)	1.82 × 10^−5 kg/(m·s)
(mean-free path of air)	0.064